Low temperature Direct Liquid Injection MOCVD of amorphous CrCx coatings in large-scale reactors: An original route to nanostructured multilayer coatings

Ionela Iliescu (1) , Yoan Gazal (2) , Alexandre Michau (3) , Fouzi Addou (1) , Thomas Duguet (1) , Eric Monsifrot , Frédéric Schuster (4) , Francis Maury (1)

1 CIRIMAT - Centre interuniversitaire de recherche et d'ingenierie des matériaux
2 SPCTS-AXE2 - Axe 2 : procédés plasmas et lasers
3 CEA - CEA- Saclay
4 CEA - Commissariat à l'énergie atomique et aux énergies alternatives

Domaines: Matériaux; Sciences de l'ingénieur [physics]

Ionela Iliescu, Yoan Gazal, Alexandre Michau, Fouzi Addou, Thomas Duguet, et al.. Low temperature Direct Liquid Injection MOCVD of amorphous CrCx coatings in large-scale reactors: An original route to nanostructured multilayer coatings. Surface and Coatings Technology, 2021, 416, pp.127174. ⟨10.1016/J.SURFCOAT.2021.127174⟩. ⟨hal-03934071⟩